Cyflwyno cludwr wafferi
CATEGORI CYNNYRCH
▶System Cludo Wafferi ar gyfer Proses PECVD & TALOX
• Cwch Graffit PECVD & TALOX (M4~M12)
• SM-Cwch fertigol (M4, M6)
• Rhan graffit mewnblaniad a chawod (M4~M6)
• Hambwrdd C/C a Chaenu Ceramig
• Hambwrdd RIE Metel a Chaenu Ceramig
• Selio gwactod: O-Ring & SQ-Ring
▶Proses Trosglwyddo Gweadu ac Ysgythriad Gwlyb
• Cludydd H LSC neu gasét (M4~M12)
• LSC V-Carrier neu gasét (M4~M12)
• Cludydd ASC neu gasét (M4, M6)
• Blwch Cludo a Storio W/F (M4~M12)
• Cyfres Olwynion Cludiant (Roller).
▶Cludydd Cell Solar a Chludiwr Metel
• Cludydd TRC neu gasét (M4~M12)
• Cylchgrawn (gyda BELT)
Cwch GRAFFIT (Math H)
19P6-216CT (WF M4~M12)
Cwch GRAFFIT (Math H)
21P6-240CT WF M4~M12)
Cwch GRAFFIT (Math H)
23P7-308CT(W/F M4 ~ M12)
Cwch GRAFFIT (Math H)
22P/7-294TP (W/F M4 ~ M12)
Cwch GRAFFIT (Math H)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
CLUDWR WF A BLWCH STORIO (~M12)
Hambwrdd C/C neu Gludiwr (M4 ~ M10)
Hambwrdd C/C neu Gludiwr (M4 ~ M10)
CWCH FERTIGOL (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
CLUDO ASC (~M6)
CLUDO TRC(~M12)
CLUDO TRC(~M12)
GRAPHITE-BOAT(M12)
System Cludo Wafferi ar gyfer Proses PECVD
▶ Cwch GRAFFIT (Cynllun CT) Proses M10/M12
• CYSYNIAD DYLUNIO ARBENNIG
▶ Cwch GRAFFIT (Cynllun CT) Proses M4/M6
▶ Rhannau Affeithiwr BOAT
▶ FERTICAL BOAT-161.7mm WAFER
▶ Cwch FERTIGOL - WAFER 166mm
▶ Cwch FERTIGOL-161.7mm, WAFER 166mm
Cludwr Celloedd Solar a Chludiwr TRC Metel
MATH : Awtomatiaeth
MAINT WAFER : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
DEFNYDD : Cario (Casé)
GALLU: 100 taflen
LLAIN: 4.76MM/5.953mm/6.35mm
DIMENSIWN : Tua 559 × 220 × 220MM
Tua 712×260×260MM
MANTAIS : Awyrgylch
DEUNYDD: Fflam, BAR OCHR-Alwminiwm (anodizing)
SIDE PLATE-POM (gwrthstatig)
Clawr y bar gwaelod-EPDM/PU/VITON (ASE)